Femtosecond Laser Ablation of AI2O3 ceramics

IEEJ Transactions on Electronics, Information and Systems

Volumn 124, Issue 2, 2004, Pages 388-392

  Katto, Masahito ^a   Nagashima, Kengo ^b   Hashida, Masaki ^b   Fujita, Masayuki ^b   Tsukamoto, Masahiro ^c   Izawa, Yasukazu ^d  

^a KINKI UNIVERSITY   (Japan)

^b INSTITUTE FOR LASER TECHNOLOGY   (Japan)

^c OSAKA UNIVERSITY   (Japan)

^d OSAKA UNIVERSITY   (Japan)

Author keywords

Ablation rate; Ablation threshold; Al2O3ceramics; Femtosecond laser ablation

Indexed keywords

EID: 36248936227     PISSN: 03854221     EISSN: 13488155     Source Type: Journal    
DOI: 10.1541/ieejeiss.124.388     Document Type: Article

References (7)

1. J. Ihlemann, A. Scholl, H. Schmidt, and B. Wolff-Rottke: “Nanosecond and femtosecond excimer-laser ablation of oxide ceramics”, Appl. Phys. A, Vol. 60, pp. 411-417 (1995).
2. M. D. Shirk and P. A. Molian: “Review of ultra short pulsed laser ablation of materials”, J. Laser Appl., Vol. 10, pp. 18-28 (1998).
3. J. Jamdeleit, G. Urbasch, H. D. Hoffmann, H.-G. Treush, and E.W. Kreutz: “Picosecond laser ablation of thin copper filmes”, Appl. Phys. A, Vol. 63, pp. 117-121 (1996).
4. M. Hashida, A. F. Semerok, O. Gobert, G. Petite, and J.F. Wagner: “Ablation thresholds of metals with femtosecond laser pulses”, Proc. SPIE., Vol. 4423, pp. 178-185 (2001).
5. M. Hashida, A. F. Semerok, O. Gobert, G. Petite, Y. Izawa, and J.F. Wagner: “Ablation threshold dependence on pulse duration for copper”, Appl. Surf. Sci, Vol. 197-198, pp. 862-867 (2002).
6. B. N. Chichikov, C. Momma, S. Nolte, F. von Alvensleben, and A. Tunnermann: “Femtosecond, picosecond and nanosecond laser ablation of solids”, Appl. Phys. A, Vol. 63, pp. 109-115 (1996).
7. S. Preuss, M. Demchuk, and M. Stuke: “Sub-picosecond UV laser ablation of metals”, Appl. Phys. A, Vol. 61, pp. 33-37 (1995).