High-resolution F2-laser machining of micro-optic components

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4637, Issue 1, 2002, Pages 228-234

  Li, Jianzhao ^a   Herman, Peter R ^a   Wei, Midori ^a   Chen, Kevin P ^a   Ihlemann, Jürgen ^b   Marowsky, Gerd ^b   Oesterlin, Peter ^c   Burghardt, Berthold ^c  

^a UNIVERSITY OF TORONTO   (Canada)

^b LASER LABORATORIUM GÖTTINGEN E V   (Germany)

^c MicroLas Lasersystem GmbH   (Germany)

Author keywords

Ablation; F2 laser; High resolution; Micro optic component; Microfabrication; Micromachining

Indexed keywords

DIFFRACTION GRATINGS; FABRICATION; FUSED SILICA; MICROCRACKS; MICROMACHINING; MICROOPTICS; NANOTECHNOLOGY; OPTICAL FIBERS; PHOTONS;

MICRO-OPTIC COMPONENTS;

GAS LASERS;

EID: 0036403679     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.470627     Document Type: Article

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