Hexagonal microlens array modeling and fabrication using a thermal reflow process

Journal of Micromechanics and Microengineering

Volumn 13, Issue 5, 2003, Pages 775-781

  Lin, Che Ping ^a   Yang, Hsiharng ^b   Chao, Ching Kong ^a  

^a NATIONAL TAIWAN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

^b NATIONAL CHUNG HSING UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

FABRICATION; MASKS; MATHEMATICAL MODELS; MEASUREMENT ERRORS; PHOTORESISTS; POLYETHYLENE TEREPHTHALATES; SCANNING ELECTRON MICROSCOPY; SILICON; SUBSTRATES; SURFACE TENSION;

FILL FACTOR; MICROLENS ARRAY; THERMAL REFLOW;

MICROLENSES;

EID: 0141830109     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/13/5/333     Document Type: Article

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