Electrical characterization of rare earth oxides grown by atomic layer deposition

Topics in Applied Physics

Volumn 106, Issue , 2006, Pages 203-223

  Spiga, Sabina ^a   Wiemer, Claudia ^a   Scarel, Giovanna ^a   Costa, Omar ^a   Fanciulli, Marco ^a  

^a LABORATORIO MDM   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 33750801111     PISSN: 03034216     EISSN: 14370859     Source Type: Book Series    
DOI: 10.1007/11499893_13     Document Type: Article

References (64)

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