On the electrical characterization of high-κ dielectrics

MRS Bulletin

Volumn 27, Issue 3, 2002, Pages 222-225

  Degraeve, R ^a   Cartier, E ^a   Kauerauf, T ^a   Carter, R ^a   Pantisano, L ^a   Kerber, A ^a   Groeseneken, G ^a  

^a NONE

Author keywords

Electrical characteristics; Electrical properties; High dielectric constant materials; High dielectrics; Leakage current; Reliability

Indexed keywords

CMOS INTEGRATED CIRCUITS; ELECTRIC INSULATORS; ELECTRIC PROPERTIES; INTERFACES (MATERIALS); LEAKAGE CURRENTS; PERMITTIVITY; RELIABILITY; SILICA;

ELECTRICAL CHARACTERISTICS; GATE INSULATORS; GATE STACK; HIGH DIELECTRIC CONSTANT DIELECTRICS;

DIELECTRIC MATERIALS;

EID: 0036501414     PISSN: 08837694     EISSN: None     Source Type: Journal    
DOI: 10.1557/mrs2002.75     Document Type: Article

References (10)