Characterization of Gd2O3 Films Deposited on Si(100) by Electron-Beam Evaporation

Journal of the Electrochemical Society

Volumn 148, Issue 2, 2001, Pages

  Landheer, D ^a   Gupta, J A ^a   Sproule, G I ^a   McCaffrey, J P ^a   Graham, M J ^a   Yang, K C ^b   Lu, Z H ^b   Lennard, W N ^c  

^a NATIONAL RESEARCH COUNCIL CANADA   (Canada)

^b UNIVERSITY OF TORONTO   (Canada)

^c UNIVERSITY OF WESTERN ONTARIO   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0002685168     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1337607     Document Type: Article

References (15)

1. K. J. Hubbard and D. G. Schlom, J. Mater. Res., 11, 2757 (1996).
2. C. A. Billman, P. H. Tan, K. J. Hubbard, and D. G. Schlom, Mater. Res. Soc. Symp. Proc., 567, 409 (1999).
3. R. D. Shannon, J. Appl. Phys. 73, 348 (1993).
4. J. Kwo, M. Hong, A. R. Kortan, K. T. Queeney, Y. J. Chabul, J. P. Mannaerts, T. Boone, J. J. Krajewski, A. M. Sergent, and J. M. Rosamilia, Appl. Phys. Lett., 77, 130 (2000).
5. A. R. Kortan, M. Hong, J. Kwo, J. P. Mannaerts, and N. Kopylov, Phys. Rev. B, 60, 10 913 (1999).
6. J. A. Gupta, D. Landheer, G. I. Sproule, J. P. McCaffrey, M. J. Graham, K.-C. Yang, Z.-H. Lu, and W. N. Lennard, Unpublished.
7. D. Landheer, J. A. Gupta, G. I. Sproule, J. P. McCaffrey, M. J. Graham, K.-C. Yang, Z.-H. Lu, and W. N. Lennard, Abstract 246. The Electrochemical Society Meeting Abstracts, Vol. 2000-1, Toronto, ON, Canada, May 14-18, 2000.
8. L. G. Parratt, Phys. Rev., 95, 359 (1954).
9. Handbook of Auger Electron Spectroscopy, 2nd ed., L. E. Davis, N. C. MacDonald, P. W. Palmberg, G. E. Riach, and R. E. Weber, Editors, Physical Electronics Industries, Eden Prairie, MN (1972).
10. S. M. Sze, Physics of Semiconductor Devices, 2nd ed., p. 403, Wiley-Interscience, New York (1981).
11. M. Lenzlinger and E. H. Snow, J. Appl. Phys., 40, 278 (1969).
12. J. Robertson, J. Vac. Sci. Technol. B, 18, 1785 (2000).
13. R. M. Imamov, N. A. Ragimli, and S. A. Semiletov, Sov. Phys. Crystallogr., 19, 466 (1975).
14. E. J. Tarsa, K. L. McCormick, and J. S. Speck, Miter. Res. Soc. Symp. Proc., 341, 73 (1994).
15. U. Kolitsch, H. J. Seifert, and F. Aldinger, J. Alloys Compd., 257, 104 (1997) and references cited therein.