A literature survey on the design approaches and operational issues of automated wafer-transport systems for wafer fabs

Production Planning and Control

Volumn 17, Issue 7, 2006, Pages 648-663

  Montoya Torres, J R ^a  

^a Ingeniería Biomédica ECCI y GINIC HUS   (Colombia)

Author keywords

Facility layout; Material handling systems; Semiconductor manufacturing; Survey

Indexed keywords

AUTOMATION; ENGINEERING RESEARCH; INTEGRATED CIRCUIT LAYOUT; INTEGRATED CIRCUIT MANUFACTURE; MATERIALS HANDLING; SEMICONDUCTOR MATERIALS;

AUTOMATED MATERIAL HANDLING SYSTEMS (AMHS); FACILITY LAYOUT; OPERATIONS MANAGEMENT COMMUNITY; SEMICONDUCTOR MANUFACTURING;

ELECTRONICS INDUSTRY;

EID: 33750535173     PISSN: 09537287     EISSN: 13665871     Source Type: Journal    
DOI: 10.1080/09537280600900774     Document Type: Article

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