Simulation based comparison of semiconductor AMHS alternatives: Continuous Flow vs. Overhead Monorail

Winter Simulation Conference Proceedings

Volumn 2, Issue , 2000, Pages 1333-1338

  Paprotny, Igor ^a   Shiau, Juin Yan ^a   Huh, Yo ^a   Mackulak, Gerald T ^a  

^a Arizona State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AUTOMATION; COMPUTER SIMULATION; CONVEYORS; HOISTS; MONORAILS; SEMICONDUCTOR DEVICE MANUFACTURE;

OVERHEAD MONORAIL VEHICLES (OMV); SEMICONDUCTOR AUTOMATED MATERIAL HANDLING SYSTEM (AMHS);

COMPUTER AIDED MANUFACTURING;

EID: 0034429298     PISSN: 02750708     EISSN: None     Source Type: Journal    
DOI: 10.1109/WSC.2000.899104     Document Type: Article

References (5)

1. T. Arzt F. Bulcke A New Low Cost Approach in 200 mm and 300 mm AMHS Semiconductor Fabtech 10 19 26 1999
2. H. Heinrich A. Pyke The Impact of Conveyor Transports on Factory Performance at Infineon's (Siemens) 200 mm Fab. Semiconductor Fabtech 10 15 18 1999
3. H. Jarning J. Griessing Cleanroom 'sea of lots' concept European Semiconductor 33 35 1997
4. S. Sokhan-Sanj G. Gaxiola G.T. Mackulak F. Malmgren A Comparison of the Exponential and Hyper-exponential Distributions for Modeling Move Requests in a Semiconductor Fab Proceedings of the 1999 Winter Simulation Conference 774 778 Proceedings of the 1999 Winter Simulation Conference 1999
5. S. Wu S. Sokhan-Sanj G.T. Mackulak G. Gaxiola Impact of Manufacturing Variability on Automated Material Handling System Performance Proceedings of the 1999 International Conference on Semiconductor Manufacturing Operational Modeling and Simulation 81 85 Proceedings of the 1999 International Conference on Semiconductor Manufacturing Operational Modeling and Simulation 1999