A simulation-based design framework for automated material handling systems in 300mm fabrication facilities

Winter Simulation Conference Proceedings

Volumn 2, Issue , 2003, Pages 1351-1359

  Nazzal, Dima ^a   Bodner, Douglas A ^a  

^a Georgia Institute of Technology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ARCHITECTURAL DESIGN; AUTOMATION; COMPUTER SIMULATION; CONVEYORS; DECISION MAKING; ERGONOMICS; MANUFACTURE;

AUTOMATED MATERIAL HANDLING SYSTEMS (AMHS); SEMICONDUCTOR INDUSTRY;

MATERIALS HANDLING;

EID: 1642477910     PISSN: 02750708     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (22)

1. Bahri, N., J. Reiss, and B. Doherty. 2001. A Comparison of Unified vs. Segregated Automated Material Handling Systems for 300 mm Fabs. 2001 IEEE/SEM Advanced Semiconductor Manufacturing Conference: 3-6.
2. Bodner, D. A., T. Govindaraj, K. N. Karathur, N. F. Zerangue, L. F. McGinnis, M. Goetschalckx, and G. P. Sharp. 2001. Expert Design of Industrial Systems: Formalizing the Design Process. Proceedings of the 2001 Industrial Engineering Research Conference.
3. Bodner, D. A., T. Govindaraj, and L. F. McGinnis. 2002. PIMSIM: Controller-Based Simulation and Prototyping of Material Flow Systems. Progress in Material Handling Research: 2002. To appear.
4. Colvin, T., A. Jones, L. Hennessey, and G. Mackulak. 1998. Fab Design for 300mm Wafer Handling. European Semiconductor: 25-27.
5. Davis, J., and P. Goel. 1997. Some Practical Considerations in Selecting the Automated Material Transport System for a Semiconductor Factory. 1997 IEEE/SEMI Advanced Semiconductor Manufacturing Conference: 362-367.
6. st Annual Summer Computer Simulation Conference: 137-142.
7. Goetschalckx, M. and L. F. McGinnis. 1989. Designing Design Tools for Material Flow Systems. Computers in Industrial Engineering 17: 265-269.
8. Horn, G., and W. Podgorski. 1998. A Focus on Cycle Time-vs-Tool Utilization "Paradox" With Material Handling Methodology. 1998 IEEE/SEMI Advanced Semiconductor Manufacturing Conference: 405-412.
9. Kurosaki, R., N. Nagao, K. Hiromi, Y. Watanabe, and H. Yano. 1997. AMHS for 300 mm Wafer. 1997 IEEE/SEMI Advanced Semiconductor Manufacturing Conference: D13-D16.
10. Mackulak, G., and P. Savory. 2001. A Simulation Based Experiment for Comparing AMHS Performance in a Semiconductor Fabrication Facility. IEEE Transactions on Semiconductor Manufacturing: 273-280.
11. Mackulak, G., F. Lawrence, and T. Colvin. 1998. Effective Simulation Model Reuse: A Case Study for AMHS Modeling. Proceedings of the 1998 Winter Simulation Conference: 979-984.
12. Meyersdorf, D., and A. Tagbizadeh. 1998. Fab Layout Design Methodology: Case of the 300mm Fabs. Semiconductor International: 187-196.
13. McGinnis, L. F. 2003. Warehouse Design Description Model. Working paper, School of Industrial and Systems Engineering, Georgia Institute of Technology.
14. Padillo, J., D. Meyersdorf, and O. Reshef. 1997. Incorporating Manufacturing Objectives into the Semiconductor Facility Layout Design Process: A Methodology and Selected Cases. 1997 IEEE/SEM Advanced Semiconductor Manufacturing Conference: 434-439.
15. Paprotny, I., J. Shiau, Y. Huh, and G. Mackulak. 2000. Simulation Based Comparison of Semiconductor AMHS Alternatives: Continuous Flow vs. Overhead Monorail. Proceedings of the 2000 Winter Simulation Conference: 1333-1338.
16. Pillai, D., T. Quinn, K. Kryder, and D. Charlson. 1999. Integration of 300mm Fab Layouts and Material Handling Automation. Proceedings of the 1999 Winter Simulation Conference: 23-26.
17. Plata, J. 1997. 300 mm Fab Design - A Total Factory Perspective. 1997 IEEE/SEMI. Advanced Semiconductor Manufacturing Conference: A5-A8.
18. Rust, K., R. Wright, and M. Shopbell. 2002. Comparative Analysis of 300 mm Automated Material Handling Systems. Modeling and Analysis of Semiconductor Manufacturing Conference: 240-245.
19. Schulz, M., T. Stanley, B. Renelt, R. Sturm, and O. Schwertschlager. 2000. Simulation Based Decision Support for Future 300mm Automated Material Handling. Proceedings of the 2000 Winter Simulation Conference: 1518-1522.
20. Steele, J. 2002. An Algorithm for Estimating the Performance of an Automated Material Handling System for the Semiconductor Industry. Modeling and Analysis of Semiconductor Manufacturing Conference: 229-234.
21. Tausch, F., and L. Hennessey. 2002. Evaluation and Comparison of a Car-Based vs. CFT Material Handling System for a 300mm Fab. Modeling and Analysis of Semiconductor Manufacturing Conference: 235-238.
22. Weiss, M. 1997. 300 mm Fab Automation Technology Options and Selection Criteria. 1997 IEEE/SEM Advanced Semiconductor Manufacturing Conference: 373-378.