Capacity calculation of an AGV system in a MP2 wafer fab by means of simulation

IEEE International Symposium on Semiconductor Manufacturing Conference, Proceedings

Volumn , Issue , 2001, Pages 385-388

  Rooney, M ^a   Van der Burgt, M ^b   Smit, T ^b   Rooda, J E ^a  

^a EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b NXP SEMICONDUCTORS   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; COMPUTER SIMULATION; INTEGRATED CIRCUIT LAYOUT; MOS DEVICES; UNMANNED VEHICLES;

AUTOMATED GUIDED VEHICLES (AGV);

WSI CIRCUITS;

EID: 0035165731     PISSN: 1523553X     EISSN: None     Source Type: Journal    
DOI: 10.1109/ISSM.2001.962996     Document Type: Article

References (3)

1. The modelling of industrial systems