Layer-based layout approach for semiconductor fabrication facilities

IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop

Volumn , Issue , 1998, Pages 385-390

  Chang, Chao Fan ^a   Chang, Shao Kung ^a  

^a INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

CELLULAR MANUFACTURING; PLANT LAYOUT; PROCESS CONTROL;

LAYER-BASED FACILITY LAYOUT;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0032255822     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)