A simulation-based experiment for comparing AMHS performance in a semiconductor fabrication facility

IEEE Transactions on Semiconductor Manufacturing

Volumn 14, Issue 3, 2001, Pages 273-280

  Mackulak, Gerald T ^a   Savory, Paul ^b  

^a Arizona State University   (United States)

^b UNIVERSITY OF NEBRASKA LINCOLN   (United States)

Author keywords

Discrete event simulation; Inventory control; Materials handling; Semiconductor device manufacture

Indexed keywords

COMPUTER SIMULATION; MATERIALS HANDLING; MATHEMATICAL MODELS; PERFORMANCE; ROBOT APPLICATIONS;

AUTOMATED MATERIAL HANDLING SYSTEM; DISCRETE EVENT SIMULATION; ROBOT UTILIZATION; SEMICONDUCTOR FABRICATION FACILITY;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0035421294     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/66.939828     Document Type: Article

References (4)

1. Throughput analysis and modeling of 300 mm intrabay transport vehicles
2. Operations research techniques: A longitudinal update 1973-1988
3. Metrics for 300 mm automated material handling (AMHS) and production equipment interfaces