Neural-network-based delivery time estimates for prioritized 300-mm automatic material handling operations

IEEE Transactions on Semiconductor Manufacturing

Volumn 17, Issue 3, 2004, Pages 324-332

  Liao, Da Yin ^a   Wang, Chia Nan ^b  

^a NATIONAL CHI NAN UNIVERSITY   (Taiwan)

^b NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

300 mm semiconductor manufacturing; AMHS; Neural network; Prioritized service

Indexed keywords

ALGORITHMS; COMPUTER SIMULATION; ESTIMATION; FUNCTIONS; MATERIALS HANDLING; MICROPROCESSOR CHIPS; POLYNOMIALS; RISK ASSESSMENT; SEMICONDUCTOR DEVICE MANUFACTURE;

300-MM SEMICONDUCTOR MANUFACTURING; AUTOMATIC MATERIAL HANDLING SYSTEMS (AMHS); PRIORITIZED SERVICES; PRODUCT QUALITY;

NEURAL NETWORKS;

EID: 4344590961     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/TSM.2004.831533     Document Type: Conference Paper

References (24)

1. J. Anderson and M. Bell, "Travel time estimation in urban road networks," in Proc. IEEE Conf. Intelligent Transportation Systems, Nov. 1997, pp. 924-929.
2. Automated Material Handling System (AMHS) Framework User Requirements Document: Version 1.0, International SEMATECH, 1999.
3. M. Ataliah, Algorithms and Theory of Computation Handbook. Boca Raton, FL: CRC Press LLC, 1999.
4. U. Bader, J. Dorner, J. Schlieber, T. Kaufmann, and M. Garbers, "Cost efficient future automation and transport concepts," in Proc. 7th Int. Symp. Semiconductor Manufacturing, Tokyo, Japan, Oct. 1998, pp. 57-60.
5. N. Bahri, J. Reiss, and B. Doherty, "Comparison of unified vs. segregated automated material handling," in Proc. IEEE Int. Symp. Semiconductor Manufacturing, San Jose, CA, Oct. 2001, pp. 3-6.
6. G. Cardarelli and P. M. Pelagagge, "Simulation tool for design and management optimization of automated interbay material handling and storage systems for large wafer fab," IEEE Trans. Semiconduct. Manufact., vol. 8, pp. 44-49, Feb. 1995.
7. C. D. Dejong and S. P. Wu, "Simulating the transport and scheduling of priority lots in semiconductor factories," in Proc. 2002 Winter Simulation Conf., San Diego, CA, Dec. 2002, pp. 1387-1391.
8. B. Ehteshami, R. B. Petrakian, and P. M. Shabe, "Trade-offs in cycle time management: Hot lots," IEEE Trans. Semiconduct. Manufact., vol. 5, pp. 101-106, May 1992.
9. P. J. Egbulu and J. M. A. Tanchoco, "Characterization of automatic guided vehicle dispatching rules," Int. J. Prod. Res., vol. 22, no. 3, pp. 359-374, 1984.
10. L. Fu and L. R. Rilett, "Dynamic O-D travel time estimation using an artificial neural network," in Proc. Vehicle Information & Navigation Systems, 6th Annu. VINS, Seattle, WA, July 1995, pp. 236-242.
11. D. Fronckowiak, A. Peikert, and K. Nishinohara, "Using discrete event simulator to analyze the impact of job priorities on cycle time in semiconductor manufacturing," in Proc. IEEE/SEMI Advanced Semi-conductor Manufacturing Conf. and Workshop, 1996, pp. 151-155.
12. F. M. Ham and I. Kostanic, Principles of Neurocomputing for Science & Engineering. New York: McGraw Hill, 2001.
13. R. Kurosaki, T. Shimura, H. Komada, T. Kojima, and Y. Watanabe, "Low cost and short lead time AMHS design using interbay/intrabay diverging and converging method for 300 mm fab," in Proc. 9th IEEE Int. Symp. Semiconductor Manufacturing, 2000, pp. 48-51.
14. D.-Y. Liao and H.-S. Fu, "Dynamic OHT allocation and dispatching in large-scaled 300 mm AMHS management," in Proc. 2002 IEEE Int. Conf. Robotics and Automation, Washington, DC, May 2002, pp. 3630-3636.
15. Y. Narahari and L. M. Khan, "Modeling the effect of hot lots in semiconductor manufacturing systems," IEEE Trans. Semiconduct. Manufact., vol. 10, pp. 185-188, Feb. 1997.
16. S. G. Nash and A. Sofer, Linear and Nonlinear Programming. New York: McGraw Hill, 1996.
17. J. C. Principe, N. R. Euliano, and W. C. Lefebvre, Neural and Adaptive Systems. New York: Wiley, 2000.
18. D. Pillai, T. Quinn, K. Kryder, and D. Charlson, "Integration of 300 mm fab layouts and material handling automation," in Proc. 1999 IEEE Int. Symp. Semiconductor Manufacturing, October 1999, pp. 23-26.
19. D. Pillai and S. Srinivasan, "Material handling automation - trends, vision, and future plans," in Proc. IEEE/SEMI Int. Symp. Semiconductor Manufacturing, 1997, pp. 251-254.
20. Qnet V2000, Vesta Service, Inc., Winetka, IL(http://www.qnetv2k.com)
21. B. Subramaniam and D. K. Kryder, "Automation challenges in the next generation semiconductor factory," in Proc. IEEE/SEMI Advanced Semiconductor Manufacturing Conf., 1997, pp. 349-355.
22. J.-H. Ting and S. M. A. Tanchoco, "Unidirectional circular layout for overhead material handling systems," Int. J. Prod. Res., vol. 38, no. 16, pp. 3913-3935, 2000.
23. L. H. Tsoukalas and R. E. Uhrig, Fuzzy and Neural Approaches in Engineering. New York: Wiley, 1997.
24. I. Weckman, "300 mm fab/AMHS layout challenge: A cookbook approach," in Proc. 7th IEEE Int. Symp. Semiconductor Manufacturing, 1998, pp. 61-64.