Simulation based decision support for future 300 mm automated material handling

Winter Simulation Conference Proceedings

Volumn 2, Issue , 2000, Pages 1518-1522

  Schulz, Mathias ^a   Stanley, Timothy D ^a   Renelt, Bernhard ^b   Sturm, Roland ^c   Schwertschlager, Oliver ^c  

^a Semiconductor300   (Germany)

^b INFINEON TECHNOLOGIES AG   (Germany)

^c FRAUNHOFER INSTITUTE FOR MANUFACTURING ENGINEERING AND AUTOMATION IPA   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

FACTORY AUTOMATION; MATHEMATICAL MODELS; SEMICONDUCTOR DEVICE MANUFACTURE;

SEMICONDUTOR WAFER FABRICATION;

SILICON WAFERS;

EID: 0034428150     PISSN: 02750708     EISSN: None     Source Type: Journal    
DOI: 10.1109/WSC.2000.899134     Document Type: Article

References (4)

1. I300I factory guidelines 1999 TX, Austin International Sematech
2. Sematech 1999 TX, Austin International technology roadmap for semiconductors
3. R. Sturm F. Frauenhoffer J. Dorner Simulation based planning of AMHS for make-to-order wafer fabrication Proceedings SimCon Symposium 2000 Proceedings SimCon Symposium 2000 Ghent Belgium 2000-February-7-11
4. R. Wright 300 mm factory layout and automated material handling Solid State Technology 12 35 42 1999