Semiconductor fabrication facility design using a hybrid search methodology

Computers and Industrial Engineering

Volumn 36, Issue 3, 1999, Pages 565-583

  Yang, Taho ^b   Rajasekharan, Maheswaran ^b   Peters, Brett A ^a  

^a Texas AandM University   (United States)

^b NONE

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTATIONAL METHODS; COMPUTER AIDED DESIGN; COMPUTER PROGRAMMING; COMPUTER SIMULATION; HYBRID COMPUTERS; INTEGRATED CIRCUIT MANUFACTURE; MATERIALS HANDLING; PROBLEM SOLVING; PRODUCT DESIGN; SIMULATED ANNEALING;

AUTOMATED MATERIAL HANDLING SYSTEM; HYBRID SEARCH METHODOLOGY; SEMICONDUCTOR FABRICATION FACILITY DESIGN; TABU SEARCH;

COMPUTER AIDED MANUFACTURING;

EID: 0033161827     PISSN: 03608352     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0360-8352(99)00151-5     Document Type: Article

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