Simulation-based cost modeling methodology for evaluation of interbay material handling in a semiconductor wafer fab

Winter Simulation Conference Proceedings

Volumn 2, Issue , 2000, Pages 1510-1517

  Murray, Shari ^a   Mackulak, Gerald T ^a   Fowler, John W ^a   Colvin, Theron ^a  

^a ARIZONA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AUTOMATION; COMPUTER SIMULATION; ERGONOMICS; MATERIALS HANDLING; SILICON WAFERS;

SEMICONDUCTOR WAFER FABRICATION;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0034430673     PISSN: 02750708     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)