Simulation analysis of the connecting transport AMHS in a wafer fab

IEEE Transactions on Semiconductor Manufacturing

Volumn 16, Issue 3, 2003, Pages 555-564

  Lin, James T ^a   Wang, Fu Kwun ^b   Wu, Chun Kuan ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^b NATIONAL TAIPEI UNIVERSITY OF TECHNOLOGY   (Taiwan)

Author keywords

Automated material handling system; Connecting transport; Mixture experiments; Simulation analysis

Indexed keywords

AUTOMATION; COMPUTER SIMULATION; MATERIALS HANDLING; SEMICONDUCTOR DEVICE MANUFACTURE; THROUGHPUT;

AUTOMATED MATERIAL HANDLING SYSTEM; CONNECTING TRANSPORT; DISCRETE EVENT SIMULATION MODEL; MIXTURE EXPERIMENTS;

SILICON WAFERS;

EID: 0042386738     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/TSM.2003.815211     Document Type: Article

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