A simulation-optimization approach for vehicle control in automated semiconductor manufacturing

International Mediterranean Modeling Multiconference, I3M 2005, European Modeling Simulation Symposium, EMSS 2005

Volumn , Issue , 2005, Pages 137-142

  Montoya Torres, Jairo R ^a,b,c   Dauzère Pérès, Stéphane ^a   Vermariën, Leon ^c  

^a Centre Microélectronique de Provence   (France)

^b ECOLE DES MINES DE SAINT ETIENNE   (France)

^c STMICROELECTRONICS   (France)

Author keywords

Automated transport; Modeling; Optimization; Semiconductor manufacturing; Simulation; Vehicle management

Indexed keywords

AUTOMATED MATERIAL HANDLING SYSTEMS; AUTOMATED TRANSPORT; FACTORY DYNAMICS; INTEGER LINEAR PROGRAMMING; INTERMEDIATE STORAGE; NETWORK PATHS; NUMBER OF VEHICLES; ONE-MACHINE; SEMICONDUCTOR FACTORIES; SEMICONDUCTOR INDUSTRY; SEMICONDUCTOR MANUFACTURING; SIMULATION; SIMULATION MODEL; SIMULATION OPTIMIZATION; TRANSPORT OPERATIONS; TRANSPORT STRATEGIES; VEHICLE CONTROL; VEHICLE MANAGEMENT;

COMPUTER SIMULATION; CONTROL SYSTEM SYNTHESIS; INTEGER PROGRAMMING; MATERIALS HANDLING; MODELS; OPTIMIZATION; SEMICONDUCTOR DEVICE MANUFACTURE; TRANSPORTATION;

VEHICLES;

EID: 84871895725     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)

1. DeJong, C.D. and S.P. Wu. 2002. "Simulating the transport and scheduling of priority lots in semiconductor factories". Proceedings of the 2002 Winter Simulation Conference, p. 1387- 1391.
2. Dia, E.H. 2005. Vehicle positioning in an automated production system (in French). Undergraduate thesis, Ecole Polytechique de Tunisie.
3. Egbelu, P.J. and J.M.A. Tanchoco. 1984. "Characterization of automatic guided vehicle dispatching rules". International Journal of Production Research, Vol. 22, p. 359-374.
4. Horn, G. and W. Podgorski. 1998. "A focus on cycle time-vs.- tool utilization .paradox. with material handling methodology". Proceedings of the 1998 IEEE/SEMI Advanced Semiconductor Manufacturing Conference. p. 405-412.
5. Jimenez, J., B. Kim, J. Fowler, G. Mackulak, Y.I. Chung and D.J. Kim. 2002. "Operational modeling and simulation of an inter-bay AMHS in semiconductor wafer fabrication". Proceedings of the 2002 Winter Simulation Conference. p. 1377-1382.
6. Lin, J.T., F.K. Wang and P.Y. Yen. 2001. "Simulation analysis of dispatching rules for an automated interbay material handling system in wafer fab". International Journal of Production Research, Vol. 39, p. 1221-1238. (Pubitemid 35165641)
7. Lin, J.T., F.K.Wang and C.K.Wu. 2003. "The connecting transport of automated material handling system in wafer fab". International Journal of Production Research, Vol. 41, p. 529-544.
8. Mackulak, G.T. and P. Savory. 2001. "A simulation-based experiment for comparing AMHS performance in a semiconductor fabrication facility". IEEE Transactions on Semiconductor Manufacturing, Vol. 14, p. 273-280. (Pubitemid 32780136)
9. Montgomery, D.G. 1991. Design and analysis of experiments, John Wiley & Sons.
10. Montoya-Torres, J.R. and J.P. Campagne. 2004. "Towards an optimised approach to control AMHS in wafer manufacturing plants". Preprints of the Third IFAC/IEEE Conference on Management and Control of Production and Logistics. p. 117-122.
11. Montoya-Torres, J.R., S. Dauzère-Pérès, H. Marian, L. Vermariën. 2005a. "Analysis of transport strategies for full-automated semiconductor fabrication using large-scale facility models". Actes du 6e Congrès International de Génie Industriel. CDROM.
12. Montoya-Torres, J.R., S. Dauzère-Pérès, L. Vermariën and H. Marian. 2005b. "Vehicle positioning in complex automated transport systems". Proceedings of the 10th IEEE Conference on Emerging Technologies and Factory Automation. To appear.
13. Qiu, L., W.J. Hsu, S.Y. Huang and H. Wang. 2002. "Scheduling and routing for AGVs: A survey". International Journal of Production Research, Vol. 40, p. 745-760.