Simulation analysis of 300 mm intrabay automation vehicle capacity alternatives

IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop

Volumn , Issue , 1998, Pages 445-450

  Mackulak, Gerald T ^a   Lawrence, Frederick P ^a   Rayter, John ^a  

^a ARIZONA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; MATERIALS HANDLING EQUIPMENT; MATHEMATICAL MODELS;

INTRABAY AUTOMATION VEHICLES;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0032256271     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)