Connecting transport AMHS in a wafer fab

International Journal of Production Research

Volumn 41, Issue 3, 2003, Pages 529-544

  Lin, J T ^a   Wang, F K ^b   Wu, C K ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^b NATIONAL TAIPEI UNIVERSITY OF TECHNOLOGY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

AUTOMATION; COMPUTER SOFTWARE; MATHEMATICAL MODELS; SILICON WAFERS;

AUTOMATED MATERIAL HANDLING SYSTEM (AMHS);

MATERIALS HANDLING;

EID: 0041958041     PISSN: 00207543     EISSN: None     Source Type: Journal    
DOI: 10.1080/0020754021000042418     Document Type: Article

References (14)

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