Integrated facility layout and material handling system design in semiconductor fabrication facilities

IEEE Transactions on Semiconductor Manufacturing

Volumn 10, Issue 3, 1997, Pages 360-369

  Peters, Brett A ^a   Yang, Taho ^a  

^a Texas AandM University   (United States)

Author keywords

Computer integrated manufacturing; Facilities design; Layout; Materials handling

Indexed keywords

COMPUTATIONAL METHODS; COMPUTER INTEGRATED MANUFACTURING; MATERIALS HANDLING; PLANT LAYOUT; PROBLEM SOLVING;

SEMICONDUCTOR FABRICATION FACILITIES;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0031200370     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/66.618209     Document Type: Article

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