Operational modeling and simulation of an inter-bay AMHS in semiconductor wafer fabrication

Winter Simulation Conference Proceedings

Volumn 2, Issue , 2002, Pages 1377-1382

  Jimenez, Jesus ^a   Kim, Bosun ^a   Fowler, John ^a   Mackulak, Gerald ^a   Choung, You In ^b   Kim, Dong Jin ^c  

^a Arizona State University   (United States)

^b ARIZONA STATE UNIVERSITY   (United States)

^c SAMSUNG Electronics   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; DECISION MAKING; MATERIALS HANDLING; PLANT LAYOUT; SEMICONDUCTOR DEVICE MANUFACTURE; STOKERS;

LIFTERS;

WSI CIRCUITS;

EID: 0036923657     PISSN: 02750708     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. Cardarelli, G and P.M. Pelagagge. 1995. Simulation Tool for Design and Management Optimization of Automated Interbay Material Handling and Storage Systems for Large Wafer Fab. IEEE Transactions on Semiconductor Manufacturing 8: 44-49.
2. th Ed: Wiley & Sons, New York.
3. Mackulak, G., and P. Savory. 2001. A Simulation-based Experiment for Comparing AMHS Performance in a Semiconductor Fabrication Facility. IEEE Transactions on Semiconductor Manufacturing 14: 273-280
4. Montgomery, D.C. 1997. Design and Analysis of Experiments, 4th ed. New York: Wiley.
5. Wein, L.M. 1988. Scheduling Semiconductor Wafer Fabrication. IEEE Transactions on Semiconductor Manufacturing 3: 115-130.