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Volumn 2, Issue , 2004, Pages 1956-1961

A queueing network approximation of semiconductor automated material handling systems: How much information do we really need?

Author keywords

[No Author keywords available]

Indexed keywords

APPROXIMATION THEORY; AUTOMATION; COMPUTER SIMULATION; MATHEMATICAL MODELS; NONLINEAR PROGRAMMING; PARAMETER ESTIMATION; ROUTERS; SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 17744394327     PISSN: 08917736     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (19)

References (15)
  • 1
    • 0242364696 scopus 로고    scopus 로고
    • Queueing network model for a class of material-handling systems
    • Curry, G., B. A. Peters, and M. Lee. 2003. Queueing network model for a class of material-handling systems. International Journal of Production Research 41 (16): 3901-20.
    • (2003) International Journal of Production Research , vol.41 , Issue.16 , pp. 3901-3920
    • Curry, G.1    Peters, B.A.2    Lee, M.3
  • 2
    • 0001242198 scopus 로고
    • Estimating variance of output from cyclic exponential queueing systems
    • Duenyas, I., and W. Hopp. 1990. Estimating variance of output from cyclic exponential queueing systems. Queueing Systems 7 (3-7): 337-54.
    • (1990) Queueing Systems , vol.7 , Issue.3-7 , pp. 337-354
    • Duenyas, I.1    Hopp, W.2
  • 5
    • 0030287203 scopus 로고    scopus 로고
    • Stochastic modeling for automated material handling system design and control
    • Johnson, M. E., and M. L. Brandeau. 1996. Stochastic modeling for automated material handling system design and control. Transportation Science 30 (4): 330-50.
    • (1996) Transportation Science , vol.30 , Issue.4 , pp. 330-350
    • Johnson, M.E.1    Brandeau, M.L.2
  • 6
    • 0032254703 scopus 로고    scopus 로고
    • Effective simulation model reuse: A case study for amhs modeling
    • ed. D. J. Medeiros, E. Watson, J. S. Carson, and M. S. Manivannan, Piscataway, New Jersey: Institute of Electrical and Electronics Engineers
    • Mackulak, G. T., F. P. Lawrence, and T. Colvin. 1998. Effective simulation model reuse: A case study for amhs modeling. In Proceedings of the 1998 Winter Simulation Conference, ed. D. J. Medeiros, E. Watson, J. S. Carson, and M. S. Manivannan, Piscataway, New Jersey: Institute of Electrical and Electronics Engineers, 979-84.
    • (1998) Proceedings of the 1998 Winter Simulation Conference , pp. 979-984
    • Mackulak, G.T.1    Lawrence, F.P.2    Colvin, T.3
  • 7
    • 0035421294 scopus 로고    scopus 로고
    • A simulation-based experiment for comparing amhs performance in a semiconductor fabrication facility
    • Mackulak, G. T., and P. Savory. 2001. A simulation-based experiment for comparing amhs performance in a semiconductor fabrication facility. IEEE Transactions on Semiconductor Manufacturing 14 (3): 273-80.
    • (2001) IEEE Transactions on Semiconductor Manufacturing , vol.14 , Issue.3 , pp. 273-280
    • Mackulak, G.T.1    Savory, P.2
  • 8
    • 0028731002 scopus 로고
    • Simulation in automated material handling system design for semiconductor manufacturing
    • ed. J. D. Tew, M. S. Manivannan, D. A. Sadowski, and A. F. Seila, Piscataway, New Jersey: Institute of Electrical and Electronics Engineers
    • Nadoli, G., and D. Pillai. 1994. Simulation in automated material handling system design for semiconductor manufacturing. In Proceedings of the 1994 Winter Simulation Conference, ed. J. D. Tew, M. S. Manivannan, D. A. Sadowski, and A. F. Seila, Piscataway, New Jersey: Institute of Electrical and Electronics Engineers, 892-99.
    • (1994) Proceedings of the 1994 Winter Simulation Conference , pp. 892-899
    • Nadoli, G.1    Pillai, D.2
  • 10
    • 0036928268 scopus 로고    scopus 로고
    • New approaches for simulation of wafer fabrication: The use of control variates and calibration metrics
    • ed. E. Yücesan, C.-H. Chen, J. L. Snowdon, and J. Charnes, Piscataway, New Jersey: Institute of Electrical and Electronics Engineers
    • Rasmidatta, C., S. Murray, J. W. Fowler, and G. T. Mackulak. 2002. New approaches for simulation of wafer fabrication: The use of control variates and calibration metrics. In Proceedings of the 2002 Winter Simulation Conference, ed. E. Yücesan, C.-H. Chen, J. L. Snowdon, and J. Charnes, Piscataway, New Jersey: Institute of Electrical and Electronics Engineers, 1414-22.
    • (2002) Proceedings of the 2002 Winter Simulation Conference , pp. 1414-1422
    • Rasmidatta, C.1    Murray, S.2    Fowler, J.W.3    Mackulak, G.T.4
  • 14
    • 0002554762 scopus 로고
    • Determination of the total number of vehicles in an agv-based material transport system
    • Tanchoco, J., and P. Egbelu. 1987. Determination of the total number of vehicles in an agv-based material transport system. Material Flow 4 (1987): 33-51.
    • (1987) Material Flow , vol.4 , Issue.1987 , pp. 33-51
    • Tanchoco, J.1    Egbelu, P.2
  • 15
    • 0033331614 scopus 로고    scopus 로고
    • Increasing first pass accuracy of AMHS simulation output using legacy data
    • ed. P. A. Farrington, H. Nembhard, D. T. Sturrock, and G. W. Evans, Piscataway, New Jersey: Institute of Electrical and Electronics Engineers
    • Wu, S., J. Rayter, I. Paprotny, G. T. Mackulak, and J. Yngve. 1999. Increasing first pass accuracy of AMHS simulation output using legacy data. In Proceedings of the 1999 Winter Simulation Conference, ed. P. A. Farrington, H. Nembhard, D. T. Sturrock, and G. W. Evans, Piscataway, New Jersey: Institute of Electrical and Electronics Engineers, 784-89.
    • (1999) Proceedings of the 1999 Winter Simulation Conference , pp. 784-789
    • Wu, S.1    Rayter, J.2    Paprotny, I.3    Mackulak, G.T.4    Yngve, J.5


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.