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Journal of Microelectromechanical Systems

Volumn 10, Issue 3, 2001, Pages 469-476

Self-supporting uncooled infrared microbolometers with low-thermal mass

(3) Almasri, Mahmoud a,b Butler, Donald P a,c Çelik Butler, Zeynep a,b

a IEEE (United States)

b BOGAZICI UNIVERSITY (Turkey)

c UNIVERSITY OF TORONTO (Canada)

Author keywords

Microbolometers; Micromachining; Uncooled infrared detection; Yttrium barium copper oxide

Indexed keywords

ELECTRODES; POLYIMIDES; THERMAL CONDUCTIVITY; THERMOMETERS; THIN FILMS; YTTRIUM BARIUM COPPER OXIDES;

MICROBOLOMETERS; THERMAL MASS; UNCOOLED INFRARED DETECTION;

MICROMACHINING;

EID: 0035441219 PISSN: 10577157 EISSN: None Source Type: Journal
DOI: 10.1109/84.946808 Document Type: Article

Times cited : (73)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.