Uncooled multimirror broad-band infrared microbolometers

Journal of Microelectromechanical Systems

Volumn 11, Issue 5, 2002, Pages 528-535

  Almasri, Mahmoud ^a,b   Çelik Butler, Zeynep ^a,b,c   Butler, Donald P ^a,b,c   Yaradanakul, Alparslan ^a,b   Yildiz, Ali ^d  

^a IEEE   (United States)

^b Southern Methodist University   (United States)

^c The University of Texas at Arlington   (United States)

^d NONE

Author keywords

Broadband; Detection; Far infrared; Infrared; Microbolometer; Uncooled; Yttrium barium copper oxide

Indexed keywords

DOUBLE MICROMIRROR STRUCTURE; MICROBOLOMETER;

BOLOMETERS; INFRARED DETECTORS; MAGNETRON SPUTTERING; MICROMACHINING; MIRRORS; YTTRIUM BARIUM COPPER OXIDES;

MICROELECTROMECHANICAL DEVICES;

EID: 0036772349     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2002.803413     Document Type: Article

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