Micromachined Infrared Sensor Arrays on Flexible Polyimide Substrates

Proceedings of IEEE Sensors

Volumn 2, Issue 2, 2003, Pages 777-782

  Mahmood, Aamer ^a   Dayeh, Shadi ^a   Butler, Donald P ^a   Çelik Butler, Zeynep ^a  

^a The University of Texas at Arlington   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BOLOMETERS; DRY ETCHING; HEAT RESISTANCE; MATHEMATICAL MODELS; MICROMACHINING; PASSIVATION; POLYIMIDES; YTTRIUM BARIUM COPPER OXIDES;

INFRARED SENSOR ARRAYS; MICROBOLOMETERS;

OPTICAL SENSORS;

EID: 1542363459     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

1. Yaradanakul, A.; Butler, D. P. and Çelik-Butler, Z., "Uncooled infrared microbolometers on a flexible substrate," IEEE Transactions on Electron Devices, 49, 930 (2002).
2. Yildiz, A.; Çelik-Butler, Z.; Butler, D. P., "Microbolometers in a flexible substrate for infrared detection," accepted for publication in IEEE Sensors Journal.
3. Travers, C. M.; Jahanzeb, A.; Butler, D. P.; and Çelik-Butler, Z., "Fabrication of semiconducting YBaCuO surface-micromachined bolometer arrays, IEEE Journal of Microelectromechanical systems, 6, 271 (1997).
4. Jahanzeb, A.; Travers, C. M.; Çelik-Butler, Z.; Butler, D. P. and Tan, S. G., "A semiconductor YBaCuO microbolometer for room temperature IR imaging," IEEE Transactions on Electron Devices, 44, 1795 (1997).
5. 4 bridges," IEEE Journal of Microelectromechanical Systems, 8, 192, (1999).
6. Almasri, M.; Butler, D. P. and Çelik-Butler, Z., "Self-supporting uncooled infrared microbolometers with low thermal mass," IEEE Journal of Microelectromechanical systems, 10, 469 (2001).