Preparation and properties of vanadium dioxide thin films for uncooled microbolometer

2000 25th International Conference on Infrared and Millimeter Waves - Conference Digest

Volumn , Issue , 2000, Pages 145-146

  Chen, Changhong ^a   Yi, Xinjian ^a   Zhao, Xingrong ^a   Xiong, Bifeng ^a  

^a HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

Author keywords

IR detectors; Temperature coefficient of resistance; Thin films; Uncooled microbolometer; Vanadium dioxide; XPS

Indexed keywords

EID: 39849097788     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICIMW.2000.892973     Document Type: Conference Paper

References (5)

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2. H Jerominek, F Picard, D Vincent "Vanadium oxide films for optical switching and detection," Opt. Eng., 32, pp2092-2099, 1993
3. 2-based IR bolometer arrays," SPIE, 2746, pp60-71, 1996
4. E E Chain, "The influence of deposition temperature on the struture and optical properties of vanadium oxide films," J. Vac. Sci. Technol., A4(3), pp432-435, 1986
5. G A Sawatzky, D Post "X-ray photoelectron and Auger spectroscopy study of some vanadium oxides," Phys. Rev., 20, pp1546-1555, 1979