Fabrication of semiconducting YBaCuO surface-micromachined bolometer arrays

Journal of Microelectromechanical Systems

Volumn 6, Issue 3, 1997, Pages 271-276

  Travers, Christine M ^a,b,c,d,e,f   Jahanzeb, Agha ^a,b,c,g,h   Butler, Donald P ^{a,b,h,i,j,k,l}   Çelik Butler, Zeynep ^a,b,j,l,m,n  

^a IEEE   (United States)

^b Southern Methodist University   (United States)

^c SOUTHERN METHODIST UNIVERSITY   (United States)

^d Transmiss Systems Engineering Group   (United States)

^e SMU   (United States)

^f PAUL SCHERRER INSTITUTE   (Switzerland)

^g UNIVERSITY OF WISCONSIN MADISON   (United States)

^h APS ^*

ⁱ UNIVERSITY OF TORONTO   (Canada)

^j UNIVERSITY OF ROCHESTER   (United States)

^k UNIVERSITY OF ROCHESTER   (United States)

^l AMERICAN PHYSICAL SOCIETY   (United States)

^m BOGAZICI UNIVERSITY   (Turkey)

ⁿ Aviation Institute   (United States)

more..

Author keywords

Infrared detection; Microbolometer; Yttrium barium copper oxide

Indexed keywords

ARRAYS; CMOS INTEGRATED CIRCUITS; FABRICATION; INFRARED DETECTORS; MICROMACHINING; NUMERICAL METHODS; SEMICONDUCTOR DEVICE STRUCTURES; SEMICONDUCTOR MATERIALS; SURFACES;

INFRARED DETECTION; MICROBOLOMETER; SILICON SURFACE MICROMACHINING TECHNIQUES;

BOLOMETERS;

EID: 0031237317     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.623117     Document Type: Article

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