Linear uncooled microbolometer array based on VOx thin films

Infrared Physics and Technology

Volumn 42, Issue 2, 2001, Pages 87-90

  Chen, Changhong ^a   Yi, Xinjian ^a   Zhang, Jing ^a   Zhao, Xingrong ^a  

^a HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

Author keywords

Infrared detector; Uncooled microbolometer; Vanadium oxide

Indexed keywords

ANNEALING; BOLOMETERS; DEPOSITION; INFRARED DETECTORS; QUARTZ; SUBSTRATES; THIN FILMS; VANADIUM COMPOUNDS;

UNCOOLED MICROBOLOMETER;

SEMICONDUCTING FILMS;

EID: 0035311771     PISSN: 13504495     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1350-4495(01)00058-5     Document Type: Article

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