Design and fabrication of linear array IR bolometers using VO2 thin films

2000 25th International Conference on Infrared and Millimeter Waves - Conference Digest

Volumn , Issue , 2000, Pages 211-212

  Chen, Changhong ^a   Yi, Xinjian ^a   Zhao, Xingrong ^a   Xiong, Bifeng ^a  

^a HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84961202838     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICIMW.2000.893003     Document Type: Conference Paper

References (8)

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2. R J Herring, P E Howard, "Design and performance of the ULTRA 320x240 uncooled focal plane array and sensor," SPIE, 2746, pp2-12, 1996
3. 2-based IR bolometer arrays," SPIE, 2746, pp60-71, 1996
4. A Tanaka, S Mastsumoto, N Tsukamoto, et al, "Infrared focal plane array incorporating silicon IC process compatible bolometer," IEEE Trans. Electron Devices, 43, pp1844-1848, 1996
5. S Sedky, P Fiorini, K Baert, et al, "Characterization and optimization of infrared poly GiGe bolometers," IEEE Trans. Electron Devices, 46, pp675-682, 1999
6. M H Unewisse, B I Craige, R J Watson, et al, "The growth and properties of semiconductor bolometers for infrared detection," SPIE, 2554, pp43, 1995
7. A Jahanzeb, C M Travers, Z Celik-Butler. A semiconductor YBaCuO microbolometer for room temperature IR imaging. IEEE Trans. Electron Devices, 44, pp1795-1801, 1997
8. K C Liddiard. Thin-film resistance bolometer IR detectors. Infrared Phys. 24, pp57-64, 1984