IR uncooled bolometers based on amorphous GexSi1-xOy on silicon micromachined structures

Journal of Microelectromechanical Systems

Volumn 11, Issue 4, 2002, Pages 322-329

  Iborra, Enrique ^a   Clement, Marta ^a   Herrero, Lucía Vergara ^a   Sangrador, Jesús ^a  

^a UNIVERSIDAD POLITÉCNICA DE MADRID   (Spain)

Author keywords

Amorphous GexSi1 xOy; Bolometers; Bulk micromachining; Sputtering

Indexed keywords

ELECTRIC CONDUCTIVITY; INFRARED RADIATION; INTEGRATED CIRCUITS; MICROMACHINING; SILICON; SPUTTERING; THERMAL CONDUCTIVITY;

MICROMACHINED MICROBOLOMETERS;

BOLOMETERS;

EID: 0036687776     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2002.800926     Document Type: Article

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