Amorphous GexSi1-xOy sputtered thin films for integrated sensor applications

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 19, Issue 1, 2001, Pages 294-298

  Clement, M ^a   Iborra, E ^a   Sangrador, J ^a   Barberan I ^a  

^a UNIVERSIDAD POLITÉCNICA DE MADRID   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATION ENERGY; AMORPHOUS FILMS; ARGON; BOLOMETERS; ELECTRIC CONDUCTIVITY; MAGNETRON SPUTTERING; OXYGEN; SEMICONDUCTING GERMANIUM COMPOUNDS; SENSORS; SPUTTER DEPOSITION;

BIAS VOLTAGES; OPTICAL GAPS; THERMAL COEFFICIENTS;

SEMICONDUCTING FILMS;

EID: 0035527650     PISSN: 0734211X     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1338551     Document Type: Article

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