Performance of microbolometer focal plane arrays under varying pressure

IEEE Electron Device Letters

Volumn 21, Issue 5, 2000, Pages 233-235

  He, X ^a   Karunasiri, G ^a   Mei, T ^b   Zeng, W J ^b   Neuzil, P ^b   Sridhar, U ^b  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

^b INSTITUTE OF MICROELECTRONICS   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

ENERGY GAP; HEAT CONDUCTION; IMAGING SYSTEMS; INTEGRATED OPTOELECTRONICS; MICROMACHINING; MOSFET DEVICES; PRESSURE; SUBSTRATES;

FOCAL PLANE ARRAYS; MICROBOLOMETER; SOLDERING IRON; WHEATSTONE BRIDGE;

BOLOMETERS;

EID: 0033731339     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/55.841306     Document Type: Article

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