A low cost uncooled infrared microbolometer focal plane array using the CMOS n-well layer

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2001, Pages 566-569

  Tezcan, Deniz Sabuncuoglu ^a   Eminoglu, Selim ^a   Akar, Orhan Sevket ^a   Akin, Tayfun ^a  

^a MIDDLE EAST TECHNICAL UNIVERSITY   (Turkey)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; ELECTRIC RESISTANCE; ELECTROCHEMISTRY; ETCHING; INFRARED RADIATION; POLYSILICON; THERMOPILES;

INFRARED MICROBOLOMETER;

BOLOMETERS;

EID: 0035011696     PISSN: 10846999     EISSN: None     Source Type: Journal    
DOI: 10.1109/MEMSYS.2001.906604     Document Type: Article

References (0)