Erratum: Micromachined infrared bolometers on flexible polyimide substrates (Senssors Actuators A 118:1 (49-56) DOI:10.1016/j.sna.2004.07.009);Micromachined infrared bolometers on flexible polyimide substrates

Sensors and Actuators, A: Physical

Volumn 118, Issue 1, 2005, Pages 49-56

  Dayeh, Shadi A ^a   Butler, Donald P ^a   Çelik Butler, Zeynep ^a  

^a The University of Texas at Arlington   (United States)

Author keywords

Flexible substrate; MEMS; Microbolometers; Micromachining; Smart skin; Yttrium barium copper oxide

Indexed keywords

BOLOMETERS; MICROELECTROMECHANICAL DEVICES; POLYIMIDES; RADIATION; SENSORS; SHEAR STRESS; SILICON WAFERS; YTTERBIUM COMPOUNDS;

FLEXIBLE SUBSTRATES; RADIATION SENSITIVE MATERIAL; SMART SKIN; YTTRIUM BARIUM COPPER OXIDE;

MICROMACHINING;

EID: 9944223686     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2005.06.005     Document Type: Erratum

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