Characterization of amorphous GexSi1-xOy for micromachined uncooled bolometer applications

Journal of Applied Physics

Volumn 94, Issue 8, 2003, Pages 5326-5332

  Ahmed, A H Z ^a   Tait, R N ^a  

^a CARLETON UNIVERSITY   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATION ENERGY; BOLOMETERS; CHEMICAL BONDS; ELECTRIC CONDUCTIVITY; EVAPORATION; FILM PREPARATION; MAGNETRON SPUTTERING; OPTICAL PROPERTIES; OXIDATION; OXYGEN; SEMICONDUCTING GERMANIUM; SEMICONDUCTING SILICON;

THERMAL EVAPORATION;

THIN FILMS;

EID: 0242304099     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1609633     Document Type: Article

References (19)

1. B. E. Cole, R. E. Higashi, and R. A. Wood, Proc. IEEE 86, 1679 (1998).
2. H. Jerominek and F. Picard, Opt. Eng. (Bellingham) 32, 2092 (1993).
3. E. Mottin and J. L. Martin, Proc. SPIE 4369, 250 (2001).
4. T. Schimert and N. Cunningham, Proc. SPIE 4232, 187 (2001).
5. E. Mottin and J. L. Martin, Proc. SPIE 4028, 40 (2000).
6. K. C. Liddiard and J. P. Knauth, Proc. SPIE 4369, 305 (2001).
7. T. A. Enukova and N. L. Ivanova, Tech. Phys. Lett. 23, 504 (1997).
8. M. Clement and E. Iborra, J. Vac. Sci. Technol. B 19, 294 (2001).
9. N. F. Mott and E. A. Davis, Electronic Processes in Non-Crystalline Materials (Clarendon, Oxford, 1979).
10. D. A. Jishiashvili and E. R. Kutelia, Phys. Status Solidi B 143, K147 (1987).
11. L. Schumann and A. Lehmann, Phys. Status Solidi B 110, K69 (1982).
12. E. Kasper and K. Lyutovich, Properties of Silicon Germanium and SiGe: Carbon (INSPEC, London, 2000).
13. E. Iborra and A. Sanz-Hervas, Rev. Sci. Instrum. 64, 1714 (1993).
14. Z. Atzmon and A. E. Bair, Appl. Phys. Lett. 66, 2244 (1995).
15. C. Tetlin and X. Wallart, J. Appl. Phys. 83, 2842 (1998).
16. E. Iborra and J. Sangrador, Thin Solid Films 337, 253 (1999).
17. E. D. Pallik, Handbook of Optical Constants of Solids (Academic, Orlando, FL, 1985).
18. P. J. Wolf and T. M. Christensen, J. Vac. Sci. Technol. A 11, 2725 (1993).
19. F. Abeles, Optical Properties of Solids (North Holland, Amsterdam, 1972).