High performance amorphous Si1-xCx:H thermistor bolometer based on micro-machined structure

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 2, Issue , 1997, Pages 1253-1256

  Ichihara, Tsutomu ^a   Watabe, Yoshifumi ^a   Honda, Yoshiaki ^a   Aizawa, Kouichi ^a  

^a PANASONIC CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATERIALS; CALCULATIONS; COMPUTER SIMULATION; FINITE ELEMENT METHOD; INFRARED DETECTORS; SILICON CARBIDE; TEMPERATURE; THERMISTORS; THIN FILMS;

AMORPHOUS SILICON CARBIDE; ELECTRONIC EXCESS NOISE; LAMINAR FILM THEORY; THERMISTOR BOLOMETER;

BOLOMETERS;

EID: 0030678721     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)