Micromachined silicon bolometers as detectors of soft X-ray, ultraviolet, visible and infrared radiation

Sensors and Actuators, A: Physical

Volumn 60, Issue 1-3, 1997, Pages 154-159

  Dobrzański, Lech ^a   Nossarzewska Orłowska, Elzbieta ^a   Nowak, Zenon ^b   Piotrowski, Józef ^b  

^a Department of Micro and Nanotechnology of Wide Bandgap Semiconductors   (Poland)

^b VIGO SYSTEM S A   (Poland)

Author keywords

Micromachining; Radiation detectors; Silicon bolometers

Indexed keywords

BOLOMETERS; ETCHING; MATHEMATICAL MODELS; MEMBRANES; MICROMACHINING; POROUS SILICON; RADIATION DETECTORS; SEMICONDUCTING SILICON COMPOUNDS;

ANISOTROPIC ETCHING; SILICON BOLOMETERS;

SILICON SENSORS;

EID: 0031146712     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)01512-4     Document Type: Article

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