IR bolometers based on amorphous silicon germanium alloys

Journal of Non-Crystalline Solids

Volumn 338-340, Issue 1 SPEC. ISS., 2004, Pages 744-748

  Garcia M ^a   Ambrosio, R ^a   Torres, A ^a   Kosarev, A ^a  

^a INSTITUTO NACIONAL DE ASTROFÍSICA   (Mexico)

Author keywords

[No Author keywords available]

Indexed keywords

BOLOMETERS; ELECTRIC POTENTIAL; GERMANIUM ALLOYS; INFRARED RADIATION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; THERMAL CONDUCTIVITY;

CURRENT NOISE; DEVICE GEOMETRY; HIGH-PERFORMANCE MICROBOLOMETERS; SENSING LAYERS;

AMORPHOUS SILICON;

EID: 2942567932     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jnoncrysol.2004.03.082     Document Type: Conference Paper

References (9)

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