Design and characterization of a dual-stage, thermally actuated nanopositioner

Journal of Micromechanics and Microengineering

Volumn 15, Issue 8, 2005, Pages 1482-1493

  Hubbard, Neal B ^a   Howell, Larry L ^a  

^a Department of Electrical and Computer Engineering   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

HYSTERESIS; MICROACTUATORS; MICROMACHINING; POLYSILICON; POSITION CONTROL; SCANNING ELECTRON MICROSCOPY; SURFACE PHENOMENA;

NANOMANIPULATORS; NANOPOSITIONERS; SURFACE MICROMACHINING; THERMAL DRIFT;

NANOTECHNOLOGY;

EID: 22544445596     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/15/8/015     Document Type: Article

References (51)

1. Ku S-S, Pinsopon U, Cetinkunt S and Nakajima S 2000 Design, fabrication, and real-time neural network control of a three-degrees-of-freedom nanopositioner IEEE/ASME Trans. Mechatron. 5 273-80
2. Scire F E and Teague E C 1978 Piezodriven 50-νm range stage with subnanometer resolution Rev. Sci. Instrum. 49 1735-40
3. Culpepper M L and Anderson G 2004 Design of a low-cost nano-manipulator which utilizes a monolithic, spatial compliant mechanism Precis. Eng. 28 469-82
4. Cheung P, Horowitz R and Howe R T 1996 Design, fabrication, position sensing, and control of an electrostatically-driven polysilicon microactuator IEEE Trans. Magn. 32 122-8
5. Hirano T et al 1998 High-bandwidth high-accuracy rotary microactuators for magnetic hard disk drive tracking servos IEEE/ASME Trans. Mechatron. 3 156-65
6. Hirano T, Fan L-S, Semba T, Lee W Y, Hong J, Pattanaik S, Webb P, Juan W-H and Chan S 1999 High-bandwidth HDD tracking servo by a moving-slider micro-actuator IEEE Trans. Magn. 35 3670-2
7. Horsley D A, Wongkomet N, Horowitz R and Pisano A P 1999 Precision positioning using a microfabricated electrostatic actuator IEEE Trans. Magn. 35 993-9
8. Imamura T, Katayama M, Ikegawa Y, Ohwe T, Koishi R and Koshikawa T 1998 MEMS based integrated head/actuator/slider for hard disk drives IEEE/ASME Trans. Mechatron. 3 166-74
9. Kim B-H and Chun K 2001 Fabrication of an electrostatic track-following micro actuator for hard disk drives using SOI wafer J. Micromech. Microeng. 11 1-6
10. Soeno Y, Ichikawa S, Tsuna T, Sato Y and Sato I 1999 Piezoelectric piggy-back microactuator for hard disk drive IEEE Trans. Magn. 35 983-7
11. Toshiyoshi H, Mita M and Fujita H 2002 A MEMS piggyback actuator for hard-disk drives J. Microelectromech. Syst. 11 648-54
12. Wang Z H, Zhu W G and Yao X 2002 d(31) type inplane bending multilayer piezoelectric microactuators-a design concept and its applications Sensors Actuators A 101 262-8
13. Hoen S, Bai Q, Harley J A, Horsley D A, Matta F, Verhoeven T, Williams J and Williams K R 2003 A high-performance dipole surface drive for large travel and force Proc. Int. Conf. Solid State Sensors Actuators vol 1 pp 344-7
14. Reid P R, Bright V M and Comtois J H 1996 Force measurements of polysilicon thermal microactuators Proc. SPIE 2882 296-306
15. Manzardo O, Herzig H P, Marxer C R and de Rooij N F 1999 Miniaturized time-scanning Fourier transform spectrometer based on silicon technology Opt. Lett. 24 1705-7
16. Jang W I, Choi C A, Lee M L, Jun C H and Kim Y T 2002 Fabrication of MEMS devices by using anhydrous HF gas-phase etching with alcoholic vapor J. Micromech. Microeng. 12 297-306
17. Shen S-C, Pan C-T and Chou H-P 2002 Electromagnetic optical switch for optical network communication J. Magn. Magn. Mater. 239 610-3
18. Syms R R A 2002 Long-travel electrothermally driven resonant cantilever microactuators J. Micromech. Microeng. 12 211-8
19. Fan L, Wu M C, Choquette K D and Crawford M H 1997 Self-assembled microactuated XYZ stages for optical scanning and alignment Proc. Int. Conf. Solid State Sensors Actuators vol 1 pp 319-22
20. Jaecklin V P, Linder C, de Rooij N F and Moret J-M 1993 Comb actuators for XYmicrostages Sensors Actuators A 39 83-9
21. Xu Y, Miller S A and MacDonald N C 1995 Microelectromechanical scanning tunneling microscope Proc. Int. Conf. Solid State Sensors Actuators vol 1 pp 640-3
22. Neagu C R, Gardeniers J G E, Elwenspoek M and Kelly J J 1996 An electrochemical microactuator: principle and first results J. Microelectromech. Syst. 5 2-9
23. Neagu C R, Gardeniers J G E, Elwenspoek M and Kelly J J 1997 An electrochemical active valve Electrochim. Acta 42 3367-73
24. Cragun R and Howell L L 1999 Linear thermomechanical microactuators Proc. ASME Micro Electro Mech. Syst. pp 181-8
25. Guckel H, Klein J, Christenson T, Skrobis K, Laudon M and Lovell E G 1992 Thermomagnetic metal flexure actuators Technical Digest-IEEE Solid-State Sensor Actuator Workshop pp 73-5
26. Li J, Brenner M P, Lang J H, Slocum A H and Struempler R 2003 DRIE-fabricated curved electrode zipping actuators with low pull-in voltage Proc. Int. Conf. Solid State Sensors Actuators vol 1 pp 480-3
27. Lott C D, McLain T W, Harb J N and Howell L L 2002 Modeling the thermal behavior of a surface-micromachined linear-displacement thermomechanical microactuator Sensors Actuators A 101 239-50
28. Fukuta Y, Collard D, Akiyama T, Yang E H and Fujita H 1997 Microactuated self-assembling of 3D polysilicon structures with reshaping technology Proc. IEEE Micro Electro Mech. Syst. pp 477-81
29. Jonsmann J, Sigmund O and Bouwstra S 1999 Compliant electro-thermal microactuators Proc. IEEE Micro Electro Mech. Syst. pp 588-93
30. Sun Y, Piyabongkarn D, Sezen A, Nelson B J and Rajamani R 2002 A high-aspect-ratio two-axis electrostatic microactuator with extended travel range Sensors Actuators A 102 49-60
31. Figliola R S and Beasley D E 2000 Theory and Design for Mechanical Measurements 3rd edn (New York: Wiley) pp 15-21
32. Figliola R S and Beasley D E 2000 Theory and Design for Mechanical Measurements 3rd edn (New York: Wiley) 121-2
33. Jaecklin V P, Linder C, de Rooij N F and Moret J-M 1992 Micromechanical comb actuators with low driving voltage J. Micromech. Microeng. 2 250-5
34. Hubbard N B and Howell L L 2004 Experimental repeatability of a thermal actuator for nanopositioning Proc. ASME Micro Electro Mech. Syst. IMECE2004-59616
35. Park J-S, Chu L L, Oliver A D and Gianchandani Y B 2001 Bent-beam electrothermal actuators-part II. Linear and rotary microengines J. Microelectromech. Syst. 10 255-62
36. Comtois J H, Michalicek M A and Barron C C 1997 Characterization of electrothermal actuators and arrays fabricated in a four-level, planarized surface-micromachined polycrystalline silicon process Proc. Int. Conf. Solid State Sensors Actuators vol 2 pp 769-72
37. Oliver A D, Vigil S R and Gianchandani Y B 2003 Photothermal surface-micromachined actuators IEEE Trans. Electron Devices 50 1156-7
38. Que L, Park J-S and Gianchandani Y B 2001 Bent-beam electrothermal actuators-part I. Single beam and cascaded devices J. Microelectromech. Syst. 10 247-54
39. Howell L L 2001 Compliant Mechanisms (New York: Wiley) p 3
40. Cai M, Hunziker G and Vahala K 1999 Fiber-optic add-drop device based on a silica microsphere-whispering gallery mode system IEEE Photon. Technol. Lett. 11 686-7
41. Sene D E, Bright V M, Comtois J H and Grantham J W 1996 Polysilicon micromechanical gratings for optical modulation Sensors Actuators A 57 145-51
42. Jensen B D, Parkinson M B, Kurabayashi K, Howell L L and Baker M S 2001 Design optimization of a fully-compliant bistable micro-mechanism Proc. ASME Micro Electro Mech. Syst. vol 3 pp 357-63
43. Baker M S 2002 On-chip actuation of compliant bistable micro-mechanisms MS Thesis Brigham Young University, Provo, UT pp 34-5
44. Gomm T, Howell L L and Selfridge R H 2002 In-plane linear-displacement bistable microrelay J. Micromech. Microeng. 12 257-64
45. Jensen K A and Howell L L 2003 An XZ micropositioning mechanism (XZMM) with out-of-plane translation Proc. ASME Des. Eng. Tech. Conf. vol 2B pp 1185-90
46. Hubbard N B 2005 Dual-stage thermally actuated surface-micromachined nanopositioners MS Thesis Brigham Young University, Provo, UT
47. Koester D, Cowen A, Mahadevan R, Stonefield M and Hardy B 2003 PolyMUMPs Design Handbook Revision 10.0 (San Jose, CA: MEMSCAP)
48. Que L, Otradovec L, Oliver A D and Gianchandani Y B 2001 Pulse and DC operation lifetimes of bent-beam electrothermal actuators Proc. IEEE Micro Electro Mech. Syst. pp 570-3
49. Chu L L, Nelson D, Oliver A D and Gianchandani Y B 2003 Performance enhancement of polysilicon electrothermal microactuators by localized self-annealing Proc. IEEE Micro Electro Mech. Syst. pp 68-71
50. Messenger R K 2004 Modeling and control of surface micromachined thermal actuators MS Thesis Brigham Young University, Provo, UT
51. Messenger R K, McLain T W and Howell L L 2004 Feedback control of a thermomechanical inplane microactuator using piezoresistive displacement sensing Proc. ASME Micro Electro Mech. Syst. IMECE2004-59810