An XZ micropositioning mechanism (XZMM) with out-of-plane translation

Proceedings of the ASME Design Engineering Technical Conference

Volumn 2 B, Issue , 2003, Pages 1185-1190

  Jensen, Kimberly A ^a   Howell, Larry L ^a  

^a Department of Electrical and Computer Engineering   (United States)

Author keywords

MEMS; Micropositioning; Out of plane; Thermal actuation

Indexed keywords

ACTUATORS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MOTION CONTROL; POLYSILICON; POSITION MEASUREMENT; SCANNING ELECTRON MICROSCOPY; VIDEO CAMERAS;

MEMS; MICROPOSITIONING; OUT-OF-PLANE; THERMAL ACTUATION;

MECHANICAL ENGINEERING;

EID: 1842812046     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/detc2003/dac-48829     Document Type: Conference Paper

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