|
Volumn 12, Issue 3, 2002, Pages 257-264
|
In-plane linear displacement bistable microrelay
|
Author keywords
[No Author keywords available]
|
Indexed keywords
ACTUATORS;
CROSSTALK;
ELECTRIC BREAKDOWN;
MICROELECTROMECHANICAL DEVICES;
BISTABLE MICRORELAYS;
SEMICONDUCTOR RELAYS;
|
EID: 0036572996
PISSN: 09601317
EISSN: None
Source Type: Journal
DOI: 10.1088/0960-1317/12/3/310 Document Type: Article |
Times cited : (64)
|
References (23)
|