Pulse and DC operation lifetimes of bent-beam electrothermal actuators

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2001, Pages 570-573

  Que, Long ^a   Otradovec, Lisa ^a   Oliver, Andrew D ^a,b   Gianchandani, Yogesh B ^a  

^a University of Wisconsin Madison   (United States)

^b SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPRESSIVE STRESS; ELECTRIC RESISTANCE; FATIGUE OF MATERIALS; FINITE ELEMENT METHOD; POLYSILICON; SINGLE CRYSTALS; STEEL; THERMAL EFFECTS;

ELECTROTHERMAL ACTUATORS;

ACTUATORS;

EID: 0035013831     PISSN: 10846999     EISSN: None     Source Type: Journal    
DOI: 10.1109/MEMSYS.2001.906605     Document Type: Article

References (0)