Polysilicon micromechanical gratings for optical modulation

Sensors and Actuators, A: Physical

Volumn 57, Issue 2, 1996, Pages 145-151

  Sene, D E ^a   Bright, V M ^a   Comtois, J H ^a   Grantham, J W ^a  

^a AIR FORCE INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Gratings; Microelectromechanical systems; Polysilicon; Surface micromachining

Indexed keywords

ENERGY TRANSFER; LIGHT MODULATION; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; OPTICAL SWITCHES; SILICONES;

OPTICAL DIFFRACTION THEORY; SURFACE MICROMACHINING;

DIFFRACTION GRATINGS;

EID: 0030282605     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)80105-7     Document Type: Article

References (6)

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