Feedback control of a thermomechanical inplane microactuator using piezoresistive displacement sensing

American Society of Mechanical Engineers, Dynamic Systems and Control Division (Publication) DSC

Volumn 73, Issue 2 PART B, 2004, Pages 1301-1310

  Messenger, Robert K ^a   McLain, Timothy W ^a   Howell, Larry L ^a  

^a Department of Electrical and Computer Engineering   (United States)

Author keywords

Feedback control; MEMS; Piezoresistivity; Thermal actuation

Indexed keywords

ELECTRIC NETWORK ANALYSIS; FEEDBACK CONTROL; MICROELECTROMECHANICAL DEVICES; POLYSILICON; RELIABILITY; THIN FILMS;

CIRCUIT DESIGN; FEEDBACK TRANSDUCERS; PIEZORESISTIVITY; THERMAL ACTUATION;

MICROACTUATORS;

EID: 19644390050     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE2004-59810     Document Type: Conference Paper

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