SCOPUS 정보 검색 플랫폼

New Diamond and Frontier Carbon Technology

Volumn 11, Issue 1, 2001, Pages 53-76

Deposition, Characterization and Applications of Nitrogen-Rich Amorphous Carbon Nitride Films

(3) Kulisch, Wilhelm a Popov, Cyril a Zambov, Ludmil a

a UNIVERSITY OF KASSEL (Germany)

Author keywords

Carbon nitride films; Humidity sensors; ICP CVD; Mechanical properties; Optical properties

Indexed keywords

EID: 0347715326 PISSN: 13449931 EISSN: None Source Type: Journal
DOI: None Document Type: Article

Times cited : (8)

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