Synthesis of carbon nitride thin films by vacuum arcs

Materials Science and Engineering: A

Volumn 209, Issue 1-2, 1996, Pages 10-15

  Husein, Imad F ^a   Zhou, YuanZhong ^a   Li, Fan ^a   Allen, Ryne C ^a   Chan, Chung ^a   Kleiman, Jacob I ^b   Gudimenko, Yu ^b   Cooper, Clark V ^c  

^a Northeastern University   (United States)

^b UNIVERSITY OF TORONTO   (Canada)

^c UNITED TECHNOLOGIES RESEARCH CENTER   (United States)

Author keywords

Carbon nitride thin films; Plasma ion implantation; Vacuum arcs

Indexed keywords

FILM PREPARATION; HARDNESS TESTING; ION IMPLANTATION; PLASMA APPLICATIONS; RAMAN SPECTROSCOPY; SURFACE TENSION; SYNTHESIS (CHEMICAL); THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

CARBON NITRIDE; CARBON NITRIDE THIN FILMS; PLASMA ION IMPLANTATION; VACUUM ARCS;

CARBON INORGANIC COMPOUNDS;

EID: 0000202182     PISSN: 09215093     EISSN: None     Source Type: Journal    
DOI: 10.1016/0921-5093(95)10096-2     Document Type: Article

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