Optical behavior of alpha-C:N films

Applied Physics Letters

Volumn 68, Issue 9, 1996, Pages 1177-1179

  Wang, X ^a   Martin, P J ^b  

^a SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

^b CSIRO   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; CHEMICAL BONDS; ELLIPSOMETRY; ENERGY GAP; ION BOMBARDMENT; LIGHT EXTINCTION; MAGNETRON SPUTTERING; NITROGEN; REFRACTIVE INDEX; X RAY PHOTOELECTRON SPECTROSCOPY;

CARBON BONDS; ION ASSISTED ARC DEPOSITION; NITROGEN DOPED AMORPHOUS CARBON; SPECTROSCOPIC ELLIPSOMETRY;

AMORPHOUS FILMS;

EID: 0030085369     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.115960     Document Type: Article

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