Capacitance humidity sensor with carbon nitride detecting element

Applied Physics A: Materials Science and Processing

Volumn 70, Issue 5, 2000, Pages 603-606

  Zambov, L M ^a   Popov, C ^a   Plass, M F ^a   Bock, A ^b   Jelinek, M ^c   Lancok, J ^c   Masseli, K ^a   Kulisch, W ^a  

^a UNIVERSITY OF KASSEL   (Germany)

^b PhysTech GmbH   (Germany)

^c INSTITUTE OF PHYSICS   (Czech Republic)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; DEPOSITION; ELLIPSOMETRY; FOURIER TRANSFORM INFRARED SPECTROSCOPY; MOISTURE; NITRIDES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PULSED LASER APPLICATIONS; SCANNING ELECTRON MICROSCOPY; TRANSPORT PROPERTIES; X RAY PHOTOELECTRON SPECTROSCOPY;

CAPACITANCE HUMIDITY SENSOR; CARBON NITRIDE;

CHEMICAL SENSORS;

EID: 0034187748     PISSN: 09478396     EISSN: None     Source Type: Journal    
DOI: 10.1007/s003390051088     Document Type: Article

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