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Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 15, Issue 1, 1997, Pages 99-106

Structure and mechanical properties of dual-ion-beam deposited CNxTiy/TiN multilayers

(5) Zhao, X A a,b Ong, C W b Tsang, Y C b Choy, C L b Chan, P W b

a SHANGHAI RESEARCH INSTITUTE OF MATERIALS (China)

b HONG KONG POLYTECHNIC UNIVERSITY (Hong Kong)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0031538534 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.580513 Document Type: Article

Times cited : (8)

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